Features

1.10 Ra microinch / 0.25 micrometer internal surface finishes

2.Metal-to-metal seal (diaphragm to body seal for high leak integrity)

3.Full internal electropolish is available

4.Designed to reduce pressure fluctuations in semiconductor gas systems

5.Meets the stringent semiconductor requirements of both point-of-use and

6.cylinder applications

Specifications

Pressure Rating：Maximum Inlet Pressure: 600 or 3500 psig / 41.4 or 241 bar

                            Outlet Pressure Ranges: 30, 60, 100, 150 psig / 2.1, 4.1, 6.9, 10.3 bar

Body Material：316L Stainless Steel Electropolish or 316L VAR Stainless Steel Electropolish

Diaphragm：Hastelloy

Valve Seat：PCTFE, Teflon PFA or Vespel

Stem & Valve Spring：316 Stainless Steel

Remaining Parts：316 Stainless Steel or Hastelloy

The  Related Products:

TESCOM Model Recommendations:

Pressure Reducing Valves:

26-1765-24-247

26-2091A24S272

44-2263-241

44-2263-241 (duplicate entry)

44-2260-942-151

44-4660S94-018

44-2263-242

26-1065-24

26-1766-26

26-1064-24

26-1062-24

26-1063-24

44-1123-24

26-1765-24-071

44-1163-24

54-2062D24

Control Valves:

44-1116-24

26-1065-24-760

44-2263-241

26-1061-24

26-1765-26

26-1764-26

26-1766-26

44-1767-24

SG1P6162

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